Vacuum (Low Pressure) Plasma
In a vacuum system, plasma is generated under the pressure below 100Torr.
The plasma keeps a uniform glow discharge with a minimized damage on the substrate.
The vacuum plasma systems made from Femtoscience Inc. divides into 5 major modules
– Reactor Chamber, Generator, Gas Flow System, and Software.
Femtoscience Inc. independently manufactures these 5 core modules.