Plasma Technology

Vacuum (Low Pressure) Plasma 2023-07-24T02:00:00+00:00

Vacuum (Low Pressure) Plasma

In a vacuum system, plasma is generated under the pressure below 100Torr.
The plasma keeps a uniform glow discharge with a minimized damage on the substrate.

Femtoscience Inc.’s Vacuum Plasma System

The vacuum plasma systems made from Femtoscience Inc. divides into 5 major modules
– Reactor Chamber, Generator, Gas Flow System, and Software.
Femtoscience Inc. independently manufactures these 5 core modules.

Vertical Chamber
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Horizontal Chamber
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