Parylene Coating System
LAVIDA 110
Parylene Coating System
| Vaporizer | Max. 200℃ (Up to 10 steps) |
|---|---|
| Pyrolysis | Max. 800℃ (3 Zoned Heater) |
| Chamber | I.D. 200 X Length 420 (mm) |
| Operation | Manual & Automatic |
| Geometry | W.1,600 x D.800 x H.1,300 (mm) |
Technical Data
Parylene Coating
Operation
Operation
Watch video
Vaporizer
- Single Block Aluminum (Not welded, Minimized Leakage)
- Heater : Max. 200 °C
- Door heater for thermal blocking : Max. 200 °C
- Vaporizing temp. setting : up to 10 step (Temp & Time)
Pyrolyzer
- Tube Material: Quartz (or Inconel as an alternative)
- Pyrolizer heater : Max. 800℃
- 3 x zoned (independent) heater
- Temperature Sensor: 2-wire K-type sensor x 3ea (Each sensor for each heater)
Deposition Chamber
- Single Block Aluminum (Not welded, Minimized Leakage)
- Uniform gas flow design (Patent No. 10-1701381)
- Chamber size : I.D. 200 mm × L. 420 mm
- Sample Loading Plate
- Rotary feed through
Cold Trap
- Trap method : Direct trap, Glass condenser
- Lowest temperature : – 80℃
- Ambient temperature : 5 ~ 30℃
Vacuum Package
- Pump: Oil Rotary Pump
- Pump displacement: 1,000 L/min @ 60Hz
- Ultimate Pressure: 5×10-3 Torr
Controller
-
- DSP on board signal controller
- Automatic / Manual operation
Interactive integrated software
- 10.2” Touchscreen PC & USB data transfer
- Saving and loading of process recipes
- Real-time process graphs and error monitoring
System Dimension
- Main System : 1,600×800×1,300 (W×D×H, mm)
- Cold Trap : 505×620×750 (W×D×H, mm)
- Vacuum Pump : 283×736×360 (W×D×H, mm)
- * Sizes may vary according to the customer’s requirements and product upgrades