Atmospheric Plasma System
WIDE FLUX 150
Atmospheric Plasma System
| Plasma | DBD |
|---|---|
| Gas | Ar, O2 |
| Generator | 13.56 MHz / Max. 300W |
| Controller | Auto & Manual control by 7” Touch PC |
| Option | X,Y,Z Robot Control |
Technical Data
Plasma Head
- Plasma Type: Direct Plasma
- Effective coverage : 150mm (Width)
- Cooling : Water cooling
- Body material : 5083 series Al alloy
Sample Plate
- Size : 180mm x 180mm
- Max. sample Height : < 3mm
Generator
- Frequency : (RF) 13.56MHz
- Power : Max. 300W
- Automatic Impedance Matching
- Process Monitoring and Control
Gas flow module
- Gas line : × 2 channels (Ar, O2)
- Gas flow control : High repeatability MFC
- MFC flow rate : 30 slm (Ar) / 100 sccm (O2)
Controller
- Automatic / Manual operation
- Interactive integrated software
- 7” Touchscreen PC
- Saving process recipes
- Real-time process graphs and error monitoring
Customization
- Robot Control
- Roll to Roll System