Parylene Coating System
LAVIDA 1000
Parylene Coating System
| Vaporizer | Max. 200℃ (Up to 10 steps) |
|---|---|
| Pyrolysis | Max. 900℃ (3 Zoned Heater) |
| Chamber | I.D. 950 X Length 1,200 (mm) |
| Operation | Manual & Automatic |
| Sample Jig | Max. 50 samples (12 inch) loading |
Technical Data
Parylene Coating
Operation
Operation
Watch video
Vaporizer
- Single Block Aluminum (Not welded, Minimized Leakage)
- Heater : Max. 200 °C
- Door heater for thermal blocking : Max. 200 °C
- Vaporizing temp. setting : up to 10 step (Temp & Time)
Pyrolyzer
- Tube Material: Quartz (or Inconel as an alternative)
- Pyrolizer heater : Max. 800℃
- 3 x zoned (independent) heater
- Temperature Sensor: 2-wire K-type sensor x 3ea (Each sensor for each heater)
Deposition Chamber
- Chamber size : I.D. 950 mm × L. 1,200 mm
- Sample Loading Plate
- Rotary feed through
Sample Jig
- Max loading Sample Q’ty : 50ea
- Available loading Max. sample size : 12inch
- Jig type: Multi- layered Aluminum shelf type
- Programmed Rotation Speed
Cold Trap
- Temperature Range : – 80 ℃ ~ RT. (± 2 ~ 3℃)
Controller
- DSP on board signal controller
- Automatic / Manual operation
- Interactive integrated software
- 10.2” Touchscreen PC & USB data transfer
- Saving and loading of process recipes
- Real-time process graphs and error monitoring
Vacuum Package
- Vacuum Pump: Mechanical booster pump and rotary pump package
- Main Pumping Valve : Pneumatic operation valve with soft-pumping capability
- Vent Valve : 2 ea of 1/2inch, Pnematic operation valve
- Vent Line : Mutli-position vent gas (Nitrogen) injection with filter
- Pressure Measurement: Pirani vacuum gauge with range of 760 ~ 1m Torr