Mass Flow Controller (MFC)
The gas flow control plays a vital role in obtaining the desired outcome through plasma processing.
Femtoscience Inc. produces its own MFC optimized for its system, which can manage a wide range of the process gas and accurately control the gas with high repeatability.
SB-100 / SB 200
Mass Flow Controller (MFC)
| Flow Rate | 100, 200 sccm |
|---|---|
| Signals | N2, O2, Air, H2, Ar, He, CO2, N2O |
| Gas Connections | ¼”, LOK Fitting |
| Operation Temperature | -20℃ ~ 65℃ |