MFC 2023-03-28T06:58:38+00:00

Mass Flow Controller (MFC)

The gas flow control plays a vital role in obtaining the desired outcome through plasma processing.
Femtoscience Inc. produces its own MFC optimized for its system, which can manage a wide range of the process gas and accurately control the gas with high repeatability.

SB-100 / SB 200
Mass Flow Controller (MFC)
Flow Rate 100, 200 sccm
Signals N2, O2, Air, H2, Ar, He, CO2, N2O
Gas Connections ¼”, LOK Fitting
Operation Temperature -20℃ ~ 65℃