진공 및 대기압 플라즈마 시스템
펨토사이언스는 모든 분야에 적용이 가능하도록 다양한 버전의 플라즈마 시스템(크기, 공정, 등)을 제조하고 있습니다.
플라즈마 장비는 크게 진공 및 대기압 플라즈마 시스템으로 구분됩니다.
진공 플라즈마
CUTE
| Process Mode | PE |
|---|---|
| Chamber | W.140 x D.200 x H.110 (mm) |
| Generator | 20~100kHz Max. 100W |
| MFC | Max. 100 sccm |
| Gauge Pressure | Atm ~ 5 x 10-4 Torr |
| Operation | Manual & Automatic |
| Geometry | W.440 x D.500 x H.560 (mm) |
COVANCE
| Process Mode | PE |
|---|---|
| Chamber | W.200 x D.220 x H.160 (mm) |
| Generator | 20~100kHz Max. 200W / 13.56MHz Max. 300W |
| MFC | Max. 200 sccm |
| Gauge Pressure | Atm ~ 5 x 10-4 Torr |
| Operation | Manual & Automatic |
| Geometry | W.510 x D.525 x H.640 (mm) |
COGRADE
| Process Mode | PE |
|---|---|
| Chamber | W.250 x D.300 x H.200 (mm) |
| Generator | 20~100kHz Max. 300W / 13.56MHz Max.300W |
| MFC | Max. 500 sccm |
| Gauge Pressure | Atm ~ 5 x 10-4 Torr |
| Operation | Manual & Automatic |
| Geometry | W.600 x D.615 x H.680 (mm) |
COVANCE-RF
| Process Mode | PE / RIE |
|---|---|
| Chamber | W. 200 x D.220 x H.160 (mm) |
| Generator | RF (13.56 MHz), Max. 300W |
| MFC | Max. 200 sccm |
| Gauge Pressure | Atm ~ 5 x 10-4 Torr |
| Operation | Manual & Automatic |
| Geometry | W.600 x D.730 x H.750 (mm) |
CIONE 4
| Process Mode | PE / RIE |
|---|---|
| Chamber | W.140 x D.200 x H.110 (mm) |
| Generator | 20~100kHz Max. 100W |
| MFC | Max. 100 sccm |
| Gauge Pressure | Atm ~ 5 x 10-4 Torr |
| Operation | Manual & Automatic |
| Geometry | W.440 x D.500 x H.560 (mm) |
CIONE 6
| Process Mode | PE / RIE |
|---|---|
| Chamber | W.200 x D.220 x H.160 (mm) |
| Generator | 20~100kHz Max. 200W / 13.56MHz Max.300W |
| MFC | Max. 200 sccm |
| Gauge Pressure | Atm ~ 5 x 10-4 Torr |
| Operation | Manual & Automatic |
| Geometry | W.510 x D.525 x H.640 (mm) |
CIONE 8
| Process Mode | PE / RIE |
|---|---|
| Chamber | W.250 x D.300 x H.200 (mm) |
| Generator | 20~100kHz Max. 300W / 13.56MHz Max.300W |
| MFC | Max. 500 sccm |
| Gauge Pressure | Atm ~ 5 x 10-4 Torr |
| Operation | Manual & Automatic |
| Geometry | W.600 x D.615 x H.680 (mm) |
COWIN
| Process Mode | PE |
|---|---|
| Chamber | W.330 x D.350 x H.340 (mm) |
| Generator | 20~100kHz Max. 300W / 13.56MHz Max. 300W or 600W |
| MFC | Max. 500 sccm |
| Gauge Pressure | Atm ~ 5 x 10-4 Torr |
| Operation | Manual & Automatic |
| Geometry | W.800 x D.800 x H.1,800 (mm) |
VITA 8
| Process Mode | RIE |
|---|---|
| Electrode Size | 9.2 Inch |
| RF Generator | 13.56MHz / Max. 300W |
| MFC | Max. 200 sccm |
| Gauge Pressure | Atm ~ 5 x 10-4 Torr |
| Operation | Manual & Automatic |
| Geometry | W.680 x D.1,030 x H.1,200(mm) |
VITA 12
| Process Mode | RIE |
|---|---|
| Electrode Size | 9.2 Inch |
| RF Generator | 13.56MHz / Max. 600W |
| MFC | Max. 200 sccm |
| Gauge Pressure | Atm ~ 5 x 10-4 Torr |
| Operation | Manual & Automatic |
| Geometry | W.748 x D.1,139 x H.1,220 (mm) |
대기압 플라즈마
WIDE FLUX 150
| Plasma | DBD |
|---|---|
| Gas | Ar, O2 |
| Generator | 13.56 MHz / Max. 300W |
| Controller | Auto & Manual control by 7” Touch PC |
| Option | X,Y,Z Robot Control |
WIDE FLUX 400
| Plasma | DBD |
|---|---|
| Gas | Ar, O2 |
| Generator | 13.56 MHz / Max. 600W |
| Controller | Auto & Manual control by 7” Touch PC |
| Option | X,Y,Z Robot Control |
PLASMA PIPETTE
| Size | W.52 x D.76 x H.270 (mm) |
|---|---|
| Weight | 375g |
| Gas | Ar (0.5~1.5 Bar) |
| Power | Low, Medium, High |
| AC Input | 100-240V~50/60Hz 1.2A Max |
| AC Adapter | 5V,4A |
파렐린 코팅 시스템
LAVIDA 110
| Vaporizer | Max. 200℃ (Up to 10 steps) |
|---|---|
| Pyrolysis | Max. 800℃ (3 Zoned Heater) |
| Chamber | I.D. 200 X Length 420 (mm) |
| Operation | Manual & Automatic |
| Geometry | W.1,600 x D.800 x H.1,300 (mm) |
LAVIDA 1000
| Vaporizer | Max. 200℃ (Up to 10 steps) |
|---|---|
| Pyrolysis | Max. 900℃ (3 Zoned Heater) |
| Chamber | I.D. 950 X Length 1,200 (mm) |
| Operation | Manual & Automatic |
| Sample Jig | Max. 50 samples (12 inch) loading |