파렐린 코팅 시스템
LAVIDA 1000
Parylene Coating System
| Vaporizer | Max. 200℃ (Up to 10 steps) |
|---|---|
| Pyrolysis | Max. 900℃ (3 Zoned Heater) |
| Chamber | I.D. 950 X Length 1,200 (mm) |
| Operation | Manual & Automatic |
| Sample Jig | Max. 50 samples (12 inch) loading |
Technical Data
Parylene Coating
Operation
Operation
Watch video
증발기 (Vaporizer)
- 알루미늄 순수 통 가공으로 누설 최소화
- Vaporizer heater : Max. 200℃
- Dimer Loading Capacity: Max. 750g
- Vaporizing temp. setting : Up to 10 step (Temp & Time)
열분해로 (Pyrolyzer)
- Tube Material: Quartz (or Inconel as an alternative)
- Pyrolizer heater : Max. 800℃
- 3 x zoned (independent) heater
- Temperature Sensor: 2-wire K-type sensor x 3ea (Each sensor for each heater)
증착챔버 (Deposition Chamber)
- 알루미늄 순수 통 가공으로 누설 최소화
- 균일한 가스 흐름 설계 (Patent No. 10-1697205)
- 챔버 사이즈: I.D. 950 mm x H. 1,200 mm
- Substrate loading plate
- Magnetic type Rotary Feed through
Sample Jig
- Max loading Sample Q’ty : 50ea
- Available loading Max. sample size : 12inch
- Jig type: Multi- layered Aluminum shelf type
- Programmed Rotation Speed
냉각 트랩 (Cold Trap)
- Temperature Range : – 80 ℃ ~ RT. (± 2 ~ 3℃)
제어기
- 중앙처리장치 : 신호 컨트롤러 보드상의 DSP 운영방식
- 사용자 인터페이스 10.2인치 터치스크린 PC로 풀 오토 와 매뉴얼 프로세스 운용
- 사용자 recipe name 저장 가능
- 프로세스 진행 상태 및 에러 실시간 감지
진공 시스템
- Vacuum Pump: Mechanical booster pump and rotary pump package
- Main Pumping Valve : Pneumatic operation valve with soft-pumping capability
- Vent Valve : 2 ea of 1/2inch, Pnematic operation valve
- Vent Line : Mutli-position vent gas (Nitrogen) injection with filter
- Pressure Measurement: Pirani vacuum gauge with range of 760 ~ 1m Torr