* Plasma mode : (Selective) Dual Mode

RIE(Reactive Ion Etching) or PE(Plasma Etching) by selection

* Chamber : 
CIONE4 : W.140 x D.200 x H.110 (mm)
CIONE6: W. 200 X D.220 X H.160 (mm)
CIONE8: W. 250 X D.300 X H.200 (mm)

* Generator :
CIONE4: 100W, 20~100kHz
CIONE6: 200W, 20~100kHz
CIONE8: 300W, 20~100kHz